By Dr. Nitaigour Premchand Mahalik (auth.)
Micromanufacturing and Nanotechnology is an rising technological infrastructure and procedure that consists of production of goods and platforms on the micro and nano scale degrees. improvement of micro and nano scale items and structures are underway as a result of the cause that they're quicker, actual and cheaper. additionally, the fundamental useful devices of such platforms possesses extraordinary mechanical, digital and chemical homes in comparison to the macro-scale opposite numbers. for the reason that this infrastructure has already develop into the prefered selection for the layout and improvement of subsequent iteration items and platforms it truly is now essential to disseminate the conceptual and useful phenomenological information in a broader context. This publication contains a choice of study and improvement papers. Its scope is the historical past and history, underlynig layout technique, program domain names and up to date developments.
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The proof mass moves in the X- and Y-axes. Polysilicon springs suspend the MEMS structure above the substrate facilitating the proof mass to move freely. Acceleration causes deflection of the proof mass from its centre position. There could up to 32 sets of radial fingers around the four sides of the square proof mass. The fingers (middle one), shown in the figure, are positioned between two plates that are fixed to the substrate. Each finger and pair of fixed plates constitutes a differential capacitor, and the deflection of the proof mass is determined by measuring the differential capacitance.
Such a type of detection method is called a single molecule based detection scheme and is very useful for the detection of specific DNA molecules. 2(b) shows how a typical bridge has been formed by the use of an electrical characteristic based hybridisation process. The electrical characteristic based detection of a specific single DNA molecule fragment is very efficient as compared to the surface stress based method. Note that the sensor is a microstructure, but the hybridization phenomenon is at the nanoscale level.
The micromolding process involves use of molds to define the deposition of the structural layer. In this case, the structural material is deposited only in those areas constituting the microdevice structure. This is apparently in contrast to both bulk and surface micromachining processes. Feature blanket deposition of the structural material followed by etching to realise the final device geometry is done in one step. Once the structural layer deposition is over the mold is dissolved by using a chemical etchant.
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